半导体领域-晶圆级封装
晶圆传送机器人WTR3
( WAFER TRANSFER ROBOT WTR3 )
 
晶圆传送机器人主要应用于半导体加工过程中,是负责在大气端(大气环境下)不同工位间晶圆传送的关键自动化设备。采用轻量、高刚性手臂、高精度、高性能的AC伺服电机和谐波减速器,可实现高速平稳的运行。
(Wafer transfer robots are key automation equipments mainly used in semiconductor producing process under the atmosphere between the different location wafer transmission. Using light weight, high rigidity, high precision, high-performance AC servo motor and harmonic reducer, the stable operation are realized. )
特征:
1.单臂/双臂对应
2.传输晶圆对应6/8/12英寸
3.采用伺服电机控制技术具有结构紧凑、组态灵活和控制性能高得特点,可适应不同的机器人本体,便于组成不同的应用系统。
4.洁净等级Class 10- Class1 满足洁净环境运动件的润滑要求,保证机器人长期平稳运行。
Features:
1.correspondence to Single arm/double arms.
2.Transmission 6/8/12 inches wafer.
3.Used servo motor control technology. With compact structure and configuration flexible and high
performance on controlling, adapt to different robot systems, facilitated composing of different application
system.
4.Cleanliness level 10 ~ Class1. Satisfied with clean environmental and lubrication requiring for moving
parts, ensuring robot long-term smoothly running.