半导体领域-晶圆级封装
晶圆预定位装置 MWA3
( WAFER ALIGNER MWA3 )
本晶圆预定位Aligner是一款高精度晶圆预定位系統。工作时通过读取数据,自动计算出定位所需的移动量,然后通过控制平台XYθ的移动,实现对晶圆的定位从而达到精确对位目的。
(This wafer aligner is in a high precision wafer pre-aligning system. Worked by reading sensor datum, calculated automatically wafer moving amounts, positioning by controlled the mobile platform and to realize wafer orientation so as to achieve precise wafer calibration. )

特征:

1.定位精度高

2.定位时间快

3.设备接口简单,易于安装和使用

4.安全可靠(误操作也不会损坏晶圆)

Features:

1.High Precise Positioning

2.Shortly Locating time

3.Interface simply, easy to install and use

4.Safe and reliable (Even wrong operation no damage the wafer)