半导体领域-晶圆级封装
晶圆分选机Wafer Sortor
 
可对8/12寸晶圆进行倒片、分选和读码。无需人工干预,在转移过程中避免了污染和损伤晶圆。
The machine is specially designed for transferring, sorting and code reading for 8/12 inch wafer.
And can keep wafer out of pollution and damage without manual intervention in whole process.
 
 
设备优势 Advantages
 
Ø  对标国际标准,独有的MES系统接口,已批量进入著名Fab厂大产线;
 
Ø  采用高性能晶圆传送机器人,最优路径设计,实现高效传送;
 
Ø  配置丰富,可依据客户需求选配、对应天车或Stock系统;
 
Ø  本地化优势售后服务,2小时内快速响应;
 

Ø Respond to international standard with own MES interface system, showing steady performance

in mass production in famous Fab;

Ø  With high performance robot and optimal path scheme to achieve high efficiency;

Ø  Diversified configuration according to actual demands, can be customized for OHT & Stocker

system;

Ø  With advantages of high quality local service, quick respond within 2 hours;

 

技术参数 specifications
 
Item
Contents
晶圆尺寸/Wafer diameter
8/12吋
UPH
≥ 300
设备尺寸/Dimensions
L1520*W1200*H2020mm(2 ports)
自重/Weight
About 800kg
洁净度/Cleanliness
可达CLASS 1