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efem

EFEM

Based on MES system, WAFER is transmitted and positioned through SECS/GEM transmission command or manual input command. It is compatible with various communication protocols and can be matched with various processes and testing equipment.

 

·Can correspond to 3-12 inch wafers of various materials;

 

·Can correspond to Foup, FOSB, SMIF, and Open Cassette;

 

·You can match the OHT system and the AGV system;

 

·In addition to the general 2-4port products, you can customize the arrangement according to customer requirements;