Home    EFEM, SORTER, SMIF Opener    8-Inch Wafer (SMIF) Dedicated EFEM And Sorter
图片1

8-Inch Wafer (SMIF) Dedicated EFEM And Sorter

SMIF Opener

is suitable for automatic opening and closing of 8-inch wafer SMIF material boxes. Sensors are used to detect the presence or absence of wafers to achieve high stability, high efficiency and Class1 cleanliness level;

 

·mechanism detects the accurate position of the material box, the cover can be opened;


·When the box is opened, check the status of the wafer in the material box, such as lamination or cross sheet;

 

·When the box is closed, check whether there is a bulge of the wafer in the material box to protect the wafer;

 

·has RFID reading function;